掩膜版製造模組
Heidelberg DWL 2000激光直寫系統
Specifications
1. Environment chamber, providing a stable environment for the system |
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- Laminar airflow (adjustable): 0.3 – 0.5 m/s | ||
- Temperature stability: ± 0.1 °C | ||
- Air quality: Class 10 | ||
2. Stage system with linear motors, air bearings and interferometric position control |
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- Maximum substrate size: 9" x 9" | ||
- Maximum write area: 200 x 200 mm² (min. 5 mm from substrate edge) | ||
- Substrate thickness: 0 to 7 mm | ||
3. Writing performance |
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- Write mode: I and II | ||
- Minimum feature size: 0.5um , 0.7um | ||
- Edge roughness(3s): 40nm , 50nm | ||
- CD uniformity(3s): 60nm , 80nm | ||
- Alignment measurement accuracy(3s): 60nm, 70nm | ||
- Overlay accuracy(3s): 160nm, 200nm | ||
- Write speed (mm2/minute): 29, 110 |
JEOL JBX-6300FS電子束光刻系統
Specifications
Writing Mode | : | High speed or high precision |
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Beam Current | : | 30pA to 20nA |
Scanning Speed | : | 12M to 250 Hz |
Accelerate Voltage | : | 20, 50 or 100 kV |
Max. Field Size (um2) | : | High speed mode: 2000 (20kV), 1000 (50kV) or 500 (100kV); High precision mode: 250 (20kV), 125 (50kV) or 62.5 (100kV) |
Mask | : | 5” x 5” x 0.09” |
Wafer | : | 4” or 2” |
Nano-imprint Mask | : | 65mm x 65mm x 6.35mm |
Chip Sample | : | 2cm x 2cm, 1.5cm x 1.5cm or 1cm x 1cm |
掃描式電子顯微鏡JEOL JSM-6490
Specifications
Resolution | : | HV mode 3 nm (30kV), 15 nm (1kV) |
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LV mode 4 nm (30kV) | ||
Magnification | : | x8 to x300000 (at 11kV or higher) |
x5 to x300000 (at 10kV or lower) | ||
Specimen Stage | : | X :125mm, Y: 100mm, Z:5-80mm |
Tilt : -10 to +90 degree | ||
Image mode | : | Secondary electron image |
Accelerating Voltage | : | 0.3kV to 30kV |
Filament | : | Factory pre-centered filament |
Auto functions | : | Focus, brightness, contrast, stigmator |
Motor control | : | 5 axes computer controlled |
Frame store | : | 640 x 480, 1280 x 960 pixels |
Image format | : | BMP, TIFF, JPEG |
掃描式電子顯微鏡HITACHI TM4000Plus
Specifications
Magnification | : | 10x-100,000x |
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Specimen Stage | : | X: 40 mm, Y: 35 mm, Rotation: 0-360 degree |
Stage Control | : | Camera navigation System, 3 axes (X, Y, Rotation) computer controlled |
Max. Sample Size | : | 80 mm (dia.), 50 mm (thickness) |
Vacuum Mode | : | HV, LV |
Signal Detector | : | BSE detector, High-Sensitivity Low- Vacuum SE detector |
Image Signal | : | BSE, SE or Mix (BSE + SE) |
Image Adjustment | : | Auto start, Auto focus, Auto brightness, Camera |
Image Data Saving | : | 2,560 x 1,920, 1,289 x 960, 640 x 480 pixels |
Image Format | : | BMP, TIFF, JPEG |