Mask Writing (Laser Direct Write System)

We provide mask making services for HKUST internal users and external users. Laser Direct Write System is installed in NFF for mask making. Please click here to find out the specification of the systems.

For HKUST internal user who wants to make a mask, please send request through our equipment booking system.

For external user, please click here to find out the procedure.

When users request for a mask made by Laser Direct Write System, there are some issues that must pay attention to.

Mask Writing (E-beam Lithography System)

E-beam Lithography System is installed in NFF for mask making. Please click here to find out the specification of the system and the requirements to use the system.