NFF Laboratory Charging Scheme

Effective from 2nd, July 2015

A. HKUST Students/Staff (HKUST Internal Users)
  1. Charges for lab access
    1. Issue of NFF access card, HK$50/card and non-refundable.
    2. Account maintenance fee, HK$100/month.
    3. Entry fee, HK$10/hour, minimum payment of HK$10 for each entry and capped at HK$300/month.
    4. Replacement of lost or damaged access card, HK$50/card.

      (Note that if you do not use your access card for six months, it will be suspended automatically; if you do not use it for 12 months, you will be treated as a NEW USER.)

  2. Charges for equipment usage
    1. Four categories of equipment (Refer to table 2):
        • Category 1: Free of charge
        • Category 2: HK$20/hour, round up to the nearest hour
        • Category 3: HK$1/minute, round up to the nearest minute
        • Category 4: HK$2/minute, round up to the nearest minute
    2. The calculation is based on when you check in and out for the equipment.
    3. Capped at HK$2,000/month/user.
  3. Others
    1. Laboratory materials that are sold in NFF. (Refer to table 1)
    2. Gold (HK$490/1000A) and Platinum (HK$566/1000A) deposition,
      Gemanium (HK$0.26/cc of GeH4) usage on furnace.

      (Prices are subject to change without notice)

    3. Mask making, HK$700/piece, 5-inch masks.
    4. E-beam lithography process. (Refer to table 3)
    5. Service charge, HK$280/hour. (Internal job request)
    6. A refundable deposit of HK$300 is needed for hiring a locker in the NFF cleanroom.
    7. Remark: For equipment usage, a penalty of HK$200 will be imposed if you book a piece of equipment but fail to show up and check in.

B. Students/Staff From Local Tertiary Institutions' (External Users)
  1. Charges for lab access
    1. Issue of NFF access card, HK$50/card and non-refundable.
    2. Account maintenance fee, HK$100/month.
    3. Entry fee, HK$10/hour, minimum payment of HK$10 for each entry and capped at HK$300/month.
    4. Replacement of lost or damaged access card, HK$50/card.

      (Note that if you do not use your access card for six months, it will be suspended automatically; if you do not use it for 12 months, you will be treated as a NEW USER.)

  2. Charge for lab or equipment usage
    1. Lab usage, HK$600/hour, based on the record on your access card.
    2. Equipment usage, HK$600/hour, based on when you check in and out for the equipment.
    3. If the lab access time and the equipment usage time is overlapping, only one of the two charges will be counted.
  3. Others
    1. Laboratory materials that are sold in NFF. (Refer to table 1)
    2. Gold (HK$490/1000A) and Platinum (HK$566/1000A) deposition,
      Gemanium (HK$0.26/cc of GeH4) usage on furnace.

      (Prices are subject to change without notice)

    3. NFF safety orientation (Part A, C and D), HK$1,000/person.
    4. Mask making, HK$1,500/piece, 5-inch masks.
    5. E-beam lithography process. (Refer to table 3)
    6. Charge to provide service by staff, HK$300/hour.
    7. A refundable deposit of HK$300 is needed for hiring a locker in the NFF cleanroom.
    8. Remarks:

      1. External users will pay an additional 16% of the above charges to cover administrative costs.

      2. For equipment usage, a penalty of HK$200 will be imposed if you book a piece of equipment but fail to show up and check in.

C. Other Users (Industry, Overseas University and Other Users)
  1. Charges for lab access
    1. Issue of NFF access card, HK$50/card and non-refundable.
    2. Account maintenance fee, HK$100/month.
    3. Entry fee, HK$10/hour, minimum payment of HK$10 for each entry and capped at HK$300/month.
    4. Replacement of lost or damaged access card, HK$50/card.

      (Note that if you do not use your access card for six months, it will be suspended automatically; if you do not use it for 12 months, you will be treated as a NEW USER.)

  2. Charge for lab or equipment usage
    1. Lab usage, HK$900/hour, based on the record on your access card.
    2. Equipment usage, HK$900/hour, based on when you check in and out for the equipment.
    3. If the lab access time and the equipment usage time is overlapping, only one of the two charges will be counted.
  3. Others
    1. Laboratory materials that are sold in NFF. (Refer to table 1)
    2. Gold (HK$490/1000A) and Platinum (HK$566/1000A) deposition,
      Gemanium (HK$0.26/cc of GeH4) usage on furnace.

      (Prices are subject to change without notice)

    3. NFF safety orientation (Part A, C and D), HK$1,000/person.
    4. Mask making, HK$2,700/piece, 5-inch masks.
    5. E-beam lithography process. (Refer to table 3)
    6. Charge to provide service by staff, HK$300/hour.
    7. A refundable deposit of HK$300 is needed for hiring a locker in the NFF cleanroom.
    8. Remarks:

      1. External users will pay an additional 16% of the above charges to cover administrative costs.

      2. For equipment usage, a penalty of HK$200 will be imposed if you book a piece of equipment but fail to show up and check in.

    Table 1. Laboratory Materials provided by NFF

    Laboratory Materials in NFF

    Item Name   Unit Price (HK$)
     1. NFF Access Card : 50
     2. AFM Non-Contact Cantilever, Model: PPP-NCHR : 383
     3. Plastic Box for AFM Cantilever : 5
     4. 4" SOI Wafer with 100um thickness silicon layer : 2,097
     5. 4" quartz wafer : 374
     6. 12" Magnopad 300 Teflon coated steel disc : 952
     7. 12" TexMet P Polishing Cloth, PSA (For 15µm) : 656
     8. 12" VerduTex Polishing Cloth, PSA (For 9,6 and 3 µm) : 340
     9. 12" ChemoMet Polishing Cloth, PSA (For 1 and 0.06µm) : 446
     10. 10" Magnopad 250 Teflon coated steel disc : 844
     11. 10" TexMet P Polishing Cloth, PSA (For 15µm) : 456
     12. 10" VerduTex Polishing Cloth, PSA (For 9,6 and 3 µm) : 248
     13. 10" MicroCloth Polishing Cloth, PSA (For 1 and 0.06µm) : 97
     14. EPI wafer, N-type (Type I) : 260
     15. 4" Double-side Polished, 525um, N-type Silicon wafer : 210
     16. 4" Double-side Polished, 400um, N-type Silicon wafer : 142
     17. 4" Double-side Polished, 400um, P-type Silicon wafer : 142
     18. 4" Double-side Polished, 200um, N-type Silicon wafer : 362
     19. 4" Double-side Polished, 200um, P-type Silicon wafer : 362
     20. 4" Single-side Polished, 525um, N-type Silicon wafer : 100
     21. 4" Single-side Polished, 525um, P-type Silicon wafer : 100
     22. 4" Glass wafers, 500um, for anodic bonding to Si : 170
     23. 6" Single-side Polished, 675um, N-type Silicon wafer : 266
     24. 6" Single-side Polished, 675um, P-type Silicon wafer : 186
     25. 1um oxide coated, 525um, Single-side Polished N-Type Silion wafer : 105
     26. 1um oxide coated, 525um, Single-side Polished P-Type Silicon wafer : 105
     27. 1um oxide coated, 400um, Double-side Polished N-Type Silicon wafer : 144
     28. 1um oxide coated, 400um, Double-side Polished P-Type Silicon wafer : 144
     29. 3um oxide coated, 400um, Double-side Polished N-Type Silicon wafer : 152
     30. 3um oxide coated, 400um, Double-side Polished P-Type Silicon wafer : 152
     31. BCR Cleanroom notebook (100 pages) : 107
     32. Cleanroom paper (50 sheets) : 47
     33. Diamond Scriber : 175
     34. Plastic tweezer for small sample : 6
     35. Tweezer : 187
     36. 2" Single Wafer Carrier with spring : 22
     37. Wafer Storage Box for 25 pcs wafers : 584
     38. 1" Single Wafer Carrier with spring : 14
     39. 4" Single Wafer Carrier with spring : 30
     40. 6" Single Wafer Carrier with spring : 56
     41. Other wafers : 119
     

    Remark: The materials and price are subject to change.

     

    Table 2. Equipment Categories

    A. Category 1: Free of Charge

    All metrology equipment
    Microscopes
    Wetstations
    Ovens/hot plates
    Photoresist coaters
    Wafer tracks
    O2 plasma ashers
    USI Wafer Cleaner
    Karl Suss Bonder SB6
     

    B. Category 2: HK$20/hour

    Charge is based on when you check in and out for the equipment.

    Sputtering equipment
    Varian 3180 Sputter
    CVC-601 Sputter
    ARC-12M Sputter
    Denton Sputter
    Edward Sputter (Au) for SEM
    NSC3000 Sputter
         
    E-beam evaporator
    Cooke Evaporator
    AST 600EI Evaporator
    AST 450I Evaporator
         
    PECVD
    STS PECVD
    310PC PECVD
    TEOS PECVD
    CNT PECVD
         
    Copper Electroplating
    LPCVD
    LPCVD-A3 Amor-Si/Poly
    LPCVD-A4 Si-Ge/Amor-Si/Poly
    LPCVD-B2 Nitride/Low-Stress Nitride
    LPCVD-B3 LTO
    LPCVD-B4 LTO/PSG
    LPCVD- F2 Nitride/Low-Stress Nitride
    LPCVD- F3 Amor-Si/Poly
    LPCVD-F4 LTO/PSG
         
    Ion implanter
    CF-3000 Implanter
     

    C. Category 3: HK$1/minute

    Charge is based on when you check in and out for the equipment.

    Dry etcher
    Lam 490 Etcher
    Poly Etcher
    GaN Etcher
    DRIE Etcher #1
    AOE Etcher
    Oxford RIE Etcher
    AST Metal Etcher
    XeF2 Silicon Etcher
    Trion RIE Etcher
    Oxford Aluminum Etcher
       
    ET3000 Epitaxy
       
    RTA
    RTP-600S
    AG610 RTP
    AW610 RTP
       
    Diffusion furnace
    Diff. Furnace-C1 FGA Annealing
    Diff. Furnace-C2 N Pre-Deposition
    Diff. Furnace-C3 P Pre-Deposition
    Diff. Furnace-C4 FGA Annealing
    Diff. Furnace-D1 Dry Oxidation
    Diff. Furnace-D2 Dry/Wet Oxidation
    Diff. Furnace-D3 Annealing/Dry/Wet Oxidation
    Diff. Furnace-D4 Annealing
    Diff. Furnace-F1 Annealing/Dry/Wet Oxidation
       
    ALD
    Oxford ALD
       
     

    D. Category 4: HK$2/minute

    Charge is based on when you check in and out for the equipment.

    Photolithography equipment
    ASML Stepper
    Karl Suss MA6
    AB-M Aligner
       
    CMP
    Strasbaugh CMP
    Wafer polisher and grinder
    Silicon Grinder
    Buehler Polisher
       
     

    Remark: The equipment in categories is subject to change.

    Table 3. Charges for the E-beam lithography process
      Substrate Long Job Short Job
    HKUST Internal Users 5"x5" soda lime HK$2,244 HK$1,494
      5"x5" quartz mask HK$2,814 HK$2,064
      Wafer or chip sample HK$2,232 HK$1,482
      Nano-imprint mask HK$2,746 HK$1,996
    External Users 5"x5" soda lime HK$5,074 HK$4,204
      5"x5" quartz mask HK$5,735 HK$4,865
      Wafer or chip sample HK$5,060 HK$4,190
      Nano-imprint mask HK$8,127 HK$7,257
    Industry Users 5"x5" soda lime HK$11,376 HK$7,355
      5"x5" quartz mask HK$12,037 HK$8,016
      Wafer or chip sample HK$11,362 HK$7,341
      Nano-imprint mask HK$14,429 HK$10,406

    Short job: Exposure time less than or equal to 3 hours
    Long job: Exposure time more than 3 hours

All prices are subject to change without notice.