- Particle count
Number of particles in various parts of the cleanroom measured monthly to maintain class 100 and class 1,000 standards.
Three separate exhaust fans, stainless steel corrosive exhaust system, galvanized solvent exhaust, stainless steel toxic exhaust, loss of exhaust alarm.
- Environmental Controls
Temperature 68 °F ± 1 °F, Humidity 35% ± 3% RH, digital controls located in each bay, 0.1 °F and 1% RH resolution, chilled mirror RH meter for calibration reference.
- HVAC System
Nine air handlers (one for each bay), 45 °F campus chilled water to coils at each air handler for sensible heat temperature control, separate makeup air unit for humidity control with variable speed fan for room pressurization and air balancing, dual totally redundant chillers for 32 °F glycol chilled water system to make-up air unit for humidity control, steam humidification to each air handler, 100 ft/min laminar air flow.
- Compressed Air
100 psi, dual oil-free compressors, twin tower air dryer, dew point meter, −100 °F dewpoint, double filtration, plumbed along each wall with multiple ports and point of use regulators.
- Nitrogen Gas
Generated from vaporizer at bulk LN2 tank, regulated at 75 psi, plumbed along each wall with multiple ports and point of use regulators.
- Deionized Water
18 MΩ, reverse osmosis feed, 0.2 µ filtration, ports on each wall, plumbed to each of eight wet benches.
- Process Vacuum
20" Hg vacuum, dual pumping system, plumbed along each wall with multiple ports.
220V, 1Ø, 3 wire panels on wall for desktop equipment, 360V,3Ø, 4 wire separate feeds for large equipment, emergency stop switch for each machine installed near the equipment, remote power switch for each group of equipment mounted on wall in the NFF.
- Conductive Flooring
Welded seams, tested to 25 kΩ - 1 MΩ between electrodes.