The baselines serve to monitor the equipment status in NFF (CWB), to quickly diagnose and fix process problems. The baselines are also designed to provide the latest information about the equipment capability and the properties of resulted materials. The detailed reports including process flow, process split and results of in-line measurement structure, electrical testing structure, devices and standard circuits will be updated every year. It will help users to identify a starting point where they can carry on their own research projects. The baseline process consists of basic process modules. Each module can also be referred by different users for their own process design. In the baseline layout, there will be a drop-in area left for users to place their own designs matched to standard baseline process.
Baseline Annual Reports